Request pdf on researchgate ultrafast laser processing from micro to nanoscale over the past few decades the rapid development of ultrafast lasers such as femtosecond lasers and picosecond . Ultrafast laser processing from micro to nanoscale crc press book over the past few decades the rapid development of ultrafast lasers such as femtosecond lasers and picosecond lasers has opened up new avenues for material processing due to their unique features such as ultrashort pulse width and extremely high peak intensity. Designed laser foci increase the versatility of ultrafast laser pulses for 3d processing of optical materials typically beam engineering is employed to control the geometry of interaction and the . 12 characteristics ofultrafast laserprocessing 3 121 nonthermalprocess 3 122 suppressionofheat affectedzone 4 123 absenceofplasmashielding 5 124 multiphotonabsorption 5 125 internalmodification 6 126 carrierexcitationindielectrics 7 127 spatialresolutionofultrafast laser processing 7 13 ultrafast lasermaterialsprocessing 9 131 . Ultrafast laser processing from micro to nanoscale industrial applications friedrich dausinger and steffen sommer about the editors koji sugioka is a senior research scientist at riken and a guest professor at tokyo university of science and tokyo denki university japan he received his phd in electronics from waseda university japan in
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